Aluminum Nitride Ceramic Heaters: The "Guardian of Temperature" in Semiconductor Manufacturing

In the semiconductor manufacturing industry, temperature control is a critical factor determining product yield. Processes such as thin film deposition and etching require precise temperature control for wafers, where temperature uniformity directly influences chip performance and reliability. Within this precision-driven process, aluminum nitride (AlN) ceramic heaters have emerged as an indispensable core component in semiconductor equipment, thanks to their outstanding performance.

Why Have Ceramic Heaters Become the Preferred Choice in Semiconductor Manufacturing?

The semiconductor process environment is extremely harsh—characterized by high vacuum, plasma, and the presence of corrosive chemical gases, which impose stringent requirements on heater materials. Traditional metal heaters find it difficult to operate reliably long-term under such conditions. In contrast, ceramic heaters, with their exceptional corrosion resistance, high electrical insulation, and thermal stability, have become the sole solution capable of fulfilling this role.

AlN ceramic heaters are installed directly inside the process chamber in close contact with the wafer. They not only support the wafer but also ensure it attains a stable and uniform process temperature, acting as the "heart" of thin film deposition equipment.

Aluminum Nitride: The Ideal Material for Ceramic Heaters

Among various ceramic materials, aluminum nitride (AlN) stands out as the optimal choice for ceramic heaters, owing to its unique combination of properties:

Excellent Thermal Conductivity

AlN boasts a theoretical thermal conductivity as high as 320 W·m⁻¹·K⁻¹. This property allows the heater to achieve rapid heating and cooling, significantly enhancing the efficiency of semiconductor manufacturing processes.

Perfect Thermal Expansion Match

The coefficient of thermal expansion of AlN (4.18×10⁻⁶ K⁻¹) closely matches that of silicon. This compatibility is crucial, as it effectively minimizes thermal stress on the wafer, directly improving product yield.

Outstanding Mechanical and Electrical Properties

AlN combines high mechanical strength, excellent wear resistance, and outstanding electrical insulation (with a volume resistivity up to 10¹³ Ω·cm), alongside low dielectric loss. This comprehensive profile fully meets the demanding material requirements of semiconductor processes.

Environmental and Safety Benefits

Unlike toxic materials such as beryllium oxide, aluminum nitride is non-toxic and environmentally friendly, aligning better with the sustainable development philosophy of modern industry.

Precision Structure and Manufacturing Process

The structural design of AlN ceramic heaters is highly sophisticated:

Ceramic Base: Carries the wafer and integrates internal heating elements and RF electrodes.

Support Structure: Utilizes ceramic materials with a matched coefficient of thermal expansion to safeguard terminals and leads.

Unique Shaft Joint: Effectively withstands erosion from plasma and chemical gases.

Internal Flow Channels: Ensure even temperature distribution across the heater.

In terms of manufacturing, advanced screen printing technology is employed, using conductor pastes such as tungsten, molybdenum, or tantalum to form precise circuit patterns. The integration of components is achieved through multilayer ceramic co-firing technology, guaranteeing the heater's reliability and long service life.

About Xiamen Juci Technology 

Xiamen Juci Technology specializes in the manufacturing of aluminum nitride (AlN) ceramics, with integrated R&D capabilities spanning from raw powder to finished products. By producing its own high-purity AlN powder and employing advanced forming and sintering processes, the company ensures dense, uniform products with excellent thermal conductivity, strong insulation, and a thermal expansion coefficient matched to silicon. Resistant to plasma erosion and delivering stable, reliable performance, Juci provides core components specifically designed for high-temperature precision applications such as semiconductor heating plates and electrostatic chucks. We are your trusted partner for advanced material solutions.